Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-12-01T03:46:49.976Z Has data issue: false hasContentIssue false
  • English
  • Français

Low Beam Energies for EDS Chemical Microanalysis in the SEM (LVEDS)

Published online by Cambridge University Press:  02 July 2020

E D Boyes
E D Boyes*
Affiliation:
DuPont Company, Experimental Station, PO Box 80356-383, Wilmington, DE 19880-0356, USA
Get access

Extract

Microanalysis data depe nd strongly on the electron beam energy used in the S E M and the effects are more pronou nced with bulk samples than with thin sections. The situation can be used to advantage but there are also significant problems. The data and any quantitative corrections can be quite different at different beam energies. Th e spectra look different and this can be both helpful and confusing, with low ene rgy x-ra y lines generally more prominent at lower voltages. S p ec tra at several different voltages are particularly informative, both for quantitative analysis and to deco nvo lute three dimensional geometries. There may be no single perfect voltage for an analysis.

Type
30 Years of Energy Dispersive Spectrometry in Microanalysis
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 188 - 189
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Agnello, R, Howard, J, McCarthy, J and O'Hara, D, (1997) MSA Proceedings, 889CrossRefGoogle Scholar
Bethe, H, (1933) Handbuch der Physik, Springer, BerlinGoogle Scholar
Boyes, E D, (1994) Proc ICEM-13, Paris, 51Google Scholar
Boyes, E D, (1997) MSA Proceedings, 1219CrossRefGoogle Scholar
Reed, S J B, (1993) Electron Microprobe Analysis, Cambridge University PressGoogle Scholar
Wollman, D A, Hilton, G C, Irwin, K D, Dulcie, L L, Newbury, D E, and Martinis, J M (1997) MSA, 1073CrossRefGoogle Scholar