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He Ion Induced Secondary Electron and Backscattered Electron Images Compared Side-by-side With Electron Beam Induced Secondary Electron, Backscattered, and Transmission Electron Images

Published online by Cambridge University Press:  03 August 2008

S Wight ,
D Meier ,
M Postek ,
A Vladar ,
J Small  and
D Newbury
S Wight
Affiliation:
National Institute of Standards and Technology
D Meier
Affiliation:
National Institute of Standards and Technology
M Postek
Affiliation:
National Institute of Standards and Technology
A Vladar
Affiliation:
National Institute of Standards and Technology
J Small
Affiliation:
National Institute of Standards and Technology
D Newbury
Affiliation:
National Institute of Standards and Technology
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1186 - 1187
Copyright
© 2008 Microscopy Society of America

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