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First Experimental Proof of Spatial Resolution Improvement in a Monochromized and Cs-Corrected TEM

Published online by Cambridge University Press:  01 August 2004

Bert Freitag
Affiliation:
FEI Electron Optics, The Netherlands
Stephan Kujawa
Affiliation:
FEI Electron Optics, The Netherlands
Peter M. Mul
Affiliation:
FEI Electron Optics, The Netherlands
Peter C. Tiemeijer
Affiliation:
FEI Electron Optics, The Netherlands
Etienne Snoeck
Affiliation:
CEMES, France
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Copyright
© 2004 Microscopy Society of America

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