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Field Ion Emission in an Atom Probe Microscope Triggered by Femtosecond-Pulsed Coherent Extreme Ultraviolet Light

Published online by Cambridge University Press:  12 March 2020

Ann N. Chiaramonti Open the ORCID record for Ann N. Chiaramonti [Opens in a new window] ,
Luis Miaja-Avila ,
Benjamin W. Caplins Open the ORCID record for Benjamin W. Caplins [Opens in a new window] ,
Paul T. Blanchard ,
David R. Diercks ,
Brian P. Gorman  and
Norman A. Sanford
Ann N. Chiaramonti*
Affiliation:
Material Measurement Laboratory, National Institute of Standards and Technology, Boulder, CO80305, USA
Luis Miaja-Avila
Affiliation:
Physical Measurement Laboratory, National Institute of Standards and Technology, Boulder, CO80305, USA
Benjamin W. Caplins
Affiliation:
Material Measurement Laboratory, National Institute of Standards and Technology, Boulder, CO80305, USA
Paul T. Blanchard
Affiliation:
Physical Measurement Laboratory, National Institute of Standards and Technology, Boulder, CO80305, USA
David R. Diercks
Affiliation:
Department of Metallurgical and Materials Engineering, Colorado School of Mines, Golden, CO80401, USA
Brian P. Gorman
Affiliation:
Department of Metallurgical and Materials Engineering, Colorado School of Mines, Golden, CO80401, USA
Norman A. Sanford
Affiliation:
Physical Measurement Laboratory, National Institute of Standards and Technology, Boulder, CO80305, USA
*
*Author for correspondence: Ann N. Chiaramonti, E-mail: [email protected]
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Abstract

This paper describes initial experimental results from an extreme ultraviolet (EUV) radiation-pulsed atom probe microscope. Femtosecond-pulsed coherent EUV radiation of 29.6 nm wavelength (41.85 eV photon energy), obtained through high harmonic generation in an Ar-filled hollow capillary waveguide, successfully triggered controlled field ion emission from the apex of amorphous SiO2 specimens. The calculated composition is stoichiometric within the error of the measurement and effectively invariant of the specimen base temperature in the range of 25 K to 150 K. Photon energies available in the EUV band are significantly higher than those currently used in the state-of-the-art near-ultraviolet laser-pulsed atom probe, which enables the possibility of additional ionization and desorption pathways. Pulsed coherent EUV light is a new and potential alternative to near-ultraviolet radiation for atom probe tomography.

Keywords

atom probe tomographyEUVfemtosecond pulsefield ion emission
Type
Software and Instrumentation
Information
Microscopy and Microanalysis , Volume 26 , Issue 2 , April 2020 , pp. 258 - 266
Copyright
Copyright © Microscopy Society of America 2020

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Footnotes

This paper is a partial contribution of the U.S. Government and is not subject to copyright in the United States.

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