Extreme SEM

Abstract

New analytical methods have been implemented with novel instrumentation designed to extend, to explore and to exploit an expanded performance envelop for high resolution imaging, EDX chemical microanalysis and chemical imaging with robust and representative bulk samples in a scanning electron microscope (SEM). A key contribution is the integrated and innovative design of the in-lens electron optics, sample holders, detectors including for EDX, specimen chamber and vacuum system. Each component has been improved individually over previous practice and they have been made to work together much better, especially with respect to combining advanced electron imaging at low voltages with efficient x-ray analysis and mapping.

Compared to a conventional out-of-lens/semi-in-lens FESEM the secondary electron image (SEI) resolution at the widely used low voltage of 1 kV is improved by a factor of almost 2x to <1.5nm and this facilitates low voltage imaging at primary magnifications of 250,000x (Fig.1) or more.