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Extracting Chemical Information From Energy-Dispersive X-Ray Spectra by Multivariate Statistical Analysis (MSA)

Published online by Cambridge University Press:  02 July 2020

M. Saunders ,
E.S.K. Menon ,
D.J. Chisholm  and
A.G. Fox
M. Saunders
Affiliation:
Center for Materials Science and Engineering, Department of Mechanical Engineering, Naval Postgraduate School, Monterey, CA, 93943, USA.
E.S.K. Menon
Affiliation:
Center for Materials Science and Engineering, Department of Mechanical Engineering, Naval Postgraduate School, Monterey, CA, 93943, USA.
D.J. Chisholm
Affiliation:
Center for Materials Science and Engineering, Department of Mechanical Engineering, Naval Postgraduate School, Monterey, CA, 93943, USA.
A.G. Fox
Affiliation:
Center for Materials Science and Engineering, Department of Mechanical Engineering, Naval Postgraduate School, Monterey, CA, 93943, USA.
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Extract

The introduction of Multivariate Statistical Analysis techniques such as Principal Component Analysis (PCA) to the study of EDS and EELS spectra has opened up new possibilities for processing spectral data. In conventional EDS analysis each spectrum provides information about the elemental composition of the sample at a specific probe position. Where the signal arises from a single phase this elemental composition corresponds to the chemical composition of the phase. However, where the probe is incident on a multiphase region of the sample it is impossible to make a direct identification of the different chemical phases contributing to the overall spectrum.

With PCA it is no longer necessary to consider the spectra as isolated pieces of information. It is now possible to analyze a series of spectra as a single entity, looking for correlations between the variations in the elemental signals present in the individual spectra.

Type
30 Years of Energy Dispersive Spectrometry in Microanalysis
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 204 - 205
Copyright
Copyright © Microscopy Society of America

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References

1.Quintana, C. and Bonnet, N, Scanning Microscopy, 8(3) (1994) 563.Google Scholar
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3.Menon, E.S.K, Saunders, M. and Dutta, I., these proceedings.Google Scholar
4. This work was carried out while one of the authors (MS) held a National Research Council-Naval Postgraduate School Research Associateship.Google Scholar