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Expert System for EPMA

Published online by Cambridge University Press:  02 July 2020

C. Fournier ,
C. Merlet ,
P.F. Staub  and
O. Dugne
C. Fournier
Affiliation:
ISTEEM. CNRS, Université de Montpellier II, Sciences et Techniques du Languedoc, PI. E. Bataillon, 34095, Montpellier Cedex 5, France
C. Merlet
Affiliation:
ISTEEM. CNRS, Université de Montpellier II, Sciences et Techniques du Languedoc, PI. E. Bataillon, 34095, Montpellier Cedex 5, France
P.F. Staub
Affiliation:
CAMECA, 103 bd St Denis, BP 6, 92403 Courbevoie Cedex, France
O. Dugne
Affiliation:
CEA VALRHO, DCC/DTE/SIM, BP 111, 26702, Pierrelatte Cedex, France
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Extract

Analysis parameters for an electron microprobe are numerous, and the accuracy of the quantitative analysis is very sensitive to the selection of these experimental conditions. The expert system intends to optimize the choice of each analysis parameter as well as to automate the phases of a quantitative analysis on all kinds of materials. To summarise, the aim of the expert system is to simplify the procedures, improve the accuracy of results and control the analysis time. The figure 1 illustrates the various stages of the expert system.

The starting point of the expert system is an interactive questionnaire concerning the sample,( ie, what is already known), and about the expectations on the analysis,( ie, the accuracy of the results and/or the duration of the analysis required by the operator). Then, the expert system performs a semi-quantitative analysis on the sample. Based on the acquisition of a wavelength qualitative spectrum, this method is a way to obtain the sample composition in a short time with the advantages of the WDS system, and with a reasonable accuracy.

Type
Mas Celebrates: Fifty Years of Electron Probe Microanalysis
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 592 - 593
Copyright
Copyright © Microscopy Society of America

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References

1.Fournier, C., Merlet, C., Fialin, M. and Dugne, O., J. Anal. At. Spectrom., 14 (1999), in press.CrossRefGoogle Scholar
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