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Experimental Method to Measure the Detective Quantum Efficiency of a Charge-Coupled Device Camera for Electron Microscopy.

Published online by Cambridge University Press:  02 July 2020

P. Favia ,
S. Cooper  and
P. E. Mooney
P. Favia
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA95488, USA
S. Cooper
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA95488, USA
P. E. Mooney
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA95488, USA
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Extract

The Detective Quantum Efficiency (DQE) is one of the best parameters to characterize the performance of a charge-coupled device (CCD) camera when electron dose is an issue. This can be when there are beam source brightness limitations as in high-resolution applications or when specimen dose must be limited. For single parameter detectors such as a backscatter detector in a SEM, the DQE is defined as the square of the signal-to noise ratio (SNR) at the output divided by the square of the signal-to-noise ratio at the input:

where S, N, and n are respectively the signal, the noise and the electron dose. This definition is not valid to describe the performance of a multi-component device as an imaging detector. In fact a CCD camera is composed of many elements or pixels.

Type
Instrument Performance
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 1134 - 1135
Copyright
Copyright © Microscopy Society of America

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