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Electron Tomography of Stacked Contact/Via Structures

Published online by Cambridge University Press:  23 November 2012

S. Xie ,
J. Chung ,
B. Purcell ,
K. Ko ,
C. Vartuli ,
G. Lian  and
F. Clark
S. Xie
Affiliation:
Texas Instruments, Dallas, TX
J. Chung
Affiliation:
Texas Instruments, Dallas, TX
B. Purcell
Affiliation:
Texas Instruments, Dallas, TX
K. Ko
Affiliation:
Texas Instruments, Dallas, TX
C. Vartuli
Affiliation:
Texas Instruments, Dallas, TX
G. Lian
Affiliation:
Texas Instruments, Dallas, TX
F. Clark
Affiliation:
Texas Instruments, Dallas, TX
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 1798 - 1799
Copyright
Copyright © Microscopy Society of America 2012

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