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Electron Holography with a Cs-Corrected Transmission Electron Microscope

Published online by Cambridge University Press:  21 December 2007

Dorin Geiger ,
Hannes Lichte ,
Martin Linck  and
Michael Lehmann
Dorin Geiger
Affiliation:
Institute for Structure Physics, Triebenberg Laboratory, Technische Universität Dresden, D-01062 Dresden, Germany
Hannes Lichte
Affiliation:
Institute for Structure Physics, Triebenberg Laboratory, Technische Universität Dresden, D-01062 Dresden, Germany
Martin Linck
Affiliation:
Institute for Structure Physics, Triebenberg Laboratory, Technische Universität Dresden, D-01062 Dresden, Germany
Michael Lehmann
Affiliation:
Institute for Optics and Atomic Physics, Technische Universität Berlin, D-10623 Berlin, Germany
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Abstract

Cs correctors have revolutionized transmission electron microscopy (TEM) in that they substantially improve point resolution and information limit. The object information is found sharply localized within 0.1 nm, and the intensity image can therefore be interpreted reliably on an atomic scale. However, for a conventional intensity image, the object exit wave can still not be detected completely in that the phase, and hence indispensable object information is missing. Therefore, for example, atomic electric-field distributions or magnetic domain structures cannot be accessed. Off-axis electron holography offers unique possibilities to recover completely the aberration-corrected object wave with uncorrected microscopes and hence we would not need a Cs-corrected microscope for improved lateral resolution. However, the performance of holography is affected by aberrations of the recording TEM in that the signal/noise properties (“phase detection limit”) of the reconstructed wave are degraded. Therefore, we have realized off-axis electron holography with a Cs-corrected TEM. The phase detection limit improves by a factor of four. A further advantage is the possibility of fine-tuning the residual aberrations by a posteriori correction. Therefore, a combination of both methods, that is, Cs correction and off-axis electron holography, opens new perspectives for complete TEM analysis on an atomic scale.

Keywords

electron holographyCs correctorsignal/noisephase detection limit
Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Issue 1: Special Issue: Materials Research in an Aberration-Free Environment , February 2008 , pp. 68 - 81
Copyright
© 2008 Microscopy Society of America

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