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Published online by Cambridge University Press: 02 July 2020
Electron energy loss spectroscopy is the only direct technique that can semi-quantitatively determine the nature of the bonding in carbon thin films. To quantify the sp2/sp3 bonding fraction, the spectrum taken from the film must be compared to that of a suitable known standard. The bonding fraction can be analysed by studying the K ionisation edge in the electron energy loss spectrum. A method for quantifying the sp2 bonding fraction in an amorphous carbon film has been described by Berger et al (1988), where the area of peak of the film is compared with that of graphite. The principle of quantifying the edge structure is to obtain a ratio of the two peak areas using the following formula, (1), where fπis the ratio between the two π* peaks, Iπ. is the integral of the transition, and ΔE is the integrated counts for the normalising energy window. The superscripts s and u denote the standard and unknown spectra respectively.