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Electron Beam Induced Charging of Focused Ion Beam Milled Semiconductor Transistors Examined Using Electron Holography

Published online by Cambridge University Press:  01 August 2004

Takeshi Kasama ,
Rafal E Dunin-Borkowski ,
Simon B Newcomb  and
Martha R McCartney
Takeshi Kasama
Affiliation:
RIKEN, Japan
Rafal E Dunin-Borkowski
Affiliation:
University of Cambridge, United Kingdom
Simon B Newcomb
Affiliation:
Sonsam Limited, Ireland
Martha R McCartney
Affiliation:
Arizona State University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 988 - 989
Copyright
© 2004 Microscopy Society of America

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