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The Effect of Charging on Electron Diffusion in Solids

Published online by Cambridge University Press:  02 July 2020

Hendrix Demers  and
Raynald Gauvm
Hendrix Demers
Affiliation:
Département de génie mécanique, Université de Sherbrooke, Sherbrooke, Québec, Canada, J1K 2R1
Raynald Gauvm
Affiliation:
Département de génie mécanique, Université de Sherbrooke, Sherbrooke, Québec, Canada, J1K 2R1
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Abstract

The studies of insulating specimen by using scanning electron microscopy (SEM) or associated microanalytical techniques such as electron probe microanalysis (EPMA), Auger electron spectroscopy (AES), etc., is limited by the charging phenomena. Different techniques have been found to minimize this problem: coating the specimen with a conductor, working at low energy [1], etc. But for a better knowledge of this effect, we have started a study of the mechanisms of charging as well as its effect on the electrons trajectories in the case of an insulating specimen. with the success, in past years, of Monte Carlo (MC) simulation of electron scattering in solid specimens [2], we have been developing a new Monte Carlo program for the simulation of the electron trajectory in insulators.

With this program, we want to understand the effect of the trapping charge on a insulating specimen. The new MC will be constructed by adding a succession of refined model. in each step, the model goes deeper in the mechanisms for the charging phenomena.

Type
Quantitative X-Ray Microanalysis in the Microprobe, in the SEM and in The ESEM:Theory and Practice (Organized by R. Gauvin and E. Lifshin)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 668 - 669
Copyright
Copyright © Microscopy Society of America 2001

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References

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