EBSD in FESEM and LVSEM

Extract

Background

Electron backscattered diffraction (EBSD) is a very powerful analysis technique to understand the crystallography of a sample in the SEM. Typically, a high beam current is needed to obtain good results because of inefficient collection of the patterns. In W-filament SEM's, the high beam current necessitates a large spot size and requisite low image resolution. The large beam current can also be a source of problems for insulating samples or sample mounts by causing charging and the resulting image drift.

To reduce the spot size with adequate beam currents for imaging, field-emission (FE) guns are used. For most FESEM's, the beam current is markedly reduced from that produced by W-filament instruments. Even though the image resolution is better, the EBSD performance tends to suffer at low beam currents for standard hardware configurations. To regain the performance of a comparable W-filament system, the EBSD hardware should be changed for the low beam current operation. This paper will address the hardware considerations for low beam current applications.