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Design and Development of an Ultra-High Vacuum Variable-Pressure Scanning Electron Microscope for Dynamical Studies of Nanostructures

Published online by Cambridge University Press:  03 August 2008

M Klein
Affiliation:
VisiTec Microtechnik GmbH, Germany
S Kodambaka
Affiliation:
University of California Los Angeles
P Marienhoff
Affiliation:
VisiTec Microtechnik GmbH, Germany
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Copyright
© 2008 Microscopy Society of America

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