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The Dark Side of EDX Tomography: Modeling Detector Shadowing to Aid 3D Elemental Signal Analysis

Published online by Cambridge University Press:  20 March 2015

Catriona S.M. Yeoh ,
David Rossouw ,
Zineb Saghi ,
Pierre Burdet ,
Rowan K. Leary  and
Paul A. Midgley
Catriona S.M. Yeoh*
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Road, Cambridge, CB3 0FS, UK
David Rossouw
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Road, Cambridge, CB3 0FS, UK
Zineb Saghi
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Road, Cambridge, CB3 0FS, UK
Pierre Burdet
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Road, Cambridge, CB3 0FS, UK
Rowan K. Leary
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Road, Cambridge, CB3 0FS, UK
Paul A. Midgley
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Road, Cambridge, CB3 0FS, UK
*
*Corresponding author. [email protected]
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Abstract

A simple model is proposed to account for the loss of collected X-ray signal by the shadowing of X-ray detectors in the scanning transmission electron microscope. The model is intended to aid the analysis of three-dimensional elemental data sets acquired using energy-dispersive X-ray tomography methods where shadow-free specimen holders are unsuitable or unavailable. The model also provides a useful measure of the detection system geometry.

Keywords

EDX tomographydetector shadowingelemental analysis
Type
Techniques and Equipment Development
Information
Microscopy and Microanalysis , Volume 21 , Issue 3 , June 2015 , pp. 759 - 764
Copyright
© Microscopy Society of America 2015 

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