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Compositional Imaging At The Sub- 2 Å Level Using A 200 Kv Schottky Field Emission Transmission Electron Microscope

Published online by Cambridge University Press:  02 July 2020

E. M. James ,
N. D. Browning ,
A. W. Nicholls ,
M. Kawasaki ,
S. Stemmer ,
Y. Xin  and
G. Duscher
E. M. James
Affiliation:
Interface Physics, University of Illinois at Chicago (M/C 273), 845 West Taylor Street, # 2236, Chicago, Illinois, 60607-7059.
N. D. Browning
Affiliation:
Interface Physics, University of Illinois at Chicago (M/C 273), 845 West Taylor Street, # 2236, Chicago, Illinois, 60607-7059.
A. W. Nicholls
Affiliation:
Interface Physics, University of Illinois at Chicago (M/C 273), 845 West Taylor Street, # 2236, Chicago, Illinois, 60607-7059.
M. Kawasaki
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196, Japan.
S. Stemmer
Affiliation:
Interface Physics, University of Illinois at Chicago (M/C 273), 845 West Taylor Street, # 2236, Chicago, Illinois, 60607-7059.
Y. Xin
Affiliation:
Interface Physics, University of Illinois at Chicago (M/C 273), 845 West Taylor Street, # 2236, Chicago, Illinois, 60607-7059.
G. Duscher
Affiliation:
Interface Physics, University of Illinois at Chicago (M/C 273), 845 West Taylor Street, # 2236, Chicago, Illinois, 60607-7059.
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Extract

Here we demonstrate sub- 2Å resolution, in compositionally sensitive Z-contrast imaging, for a 200 kV field-emission transmission electron microscope (FEGTEM). This method has shown great promise for determining the atomic structure of interfaces in such materials as ceramics, semiconductors and high-Tc superconductors.

The Z-contrast technique involves focusing an electron probe at a specimen surface (which is oriented with a zone-axis along the beam direction). The transmitted signal, at an annular detector, is displayed on a VDU, rastered synchronously with the probe. Coherent, contrast reversal effects are suppressed in this geometry; images approximate to a convolution of the probe intensity profile with the square of the projected specimen potential. The Z2 dependence means that images can, with care, be interpreted as chemically sensitive maps of the projected structure. Furthermore, electron energy loss spectroscopy (EELS) can be performed simultaneously with Z-contrast imaging to yield additional compositional information.

Type
Compositional Mapping With High Spatial Resolution
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 138 - 139
Copyright
Copyright © Microscopy Society of America

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References

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4. Research funded by NSF (DMR-9601792) and by DOE (DE-GF02-96ER45610).Google Scholar