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Co-Clustering Via Nanochannel-Membrane Modulated Ion Implantation into Si3N4 Observed By Plan-View Aberration-Corrected STEM And EELS

Published online by Cambridge University Press:  23 November 2012

W. Guan ,
U. Bhatta ,
I.M. Ross ,
J. Ghatak ,
G. Moebus  and
N. Peng
W. Guan
Affiliation:
Materials Science & Eng., University of Sheffield, Sheffield, United Kingdom
U. Bhatta
Affiliation:
Materials Science & Eng., University of Sheffield, Sheffield, United Kingdom
I.M. Ross
Affiliation:
Materials Science & Eng., University of Sheffield, Sheffield, United Kingdom
J. Ghatak
Affiliation:
Materials Science & Eng., University of Sheffield, Sheffield, United Kingdom
G. Moebus
Affiliation:
Materials Science & Eng., University of Sheffield, Sheffield, United Kingdom
N. Peng
Affiliation:
University of Surrey, Guildford, Surrey, United Kingdom
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 382 - 383
Copyright
Copyright © Microscopy Society of America 2012

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