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Characterization of Surface Roughness

Published online by Cambridge University Press:  02 July 2020

John C. Russ
John C. Russ*
Affiliation:
Materials Science and Engineering Dept., North Carolina State Univ., Raleigh, NC27695-7907
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Extract

Because of the session at this Microscopy and Microanalysis 2000 meeting concerned with the microanalysis of irregular surfaces, it seems appropriate to briefly review the methods used for the characterization of rough surfaces. This includes both mathematical tools for the concise description of surface roughness, and instruments used to acquire the necessary data. These methods are widely used in industry to characterize and specify the roughness of surfaces prepared by various machining, grinding, polishing, chemical etching, and physical and chemical deposition techniques, and to correlate the surface roughness with performance.

Historically, surface roughness has been measured by performing a linear traverse with a mechanical stylus that is sensitive to vertical displacements of nm but with a lateral resolution on the order of pm, which is quite similar to the dimensions of the region analyzed by X-ray microanalysis. Recently, more comprehensive characterizations have been obtained using a raster scan over surface areas.

Type
X-Ray Microanalysis of Rough Surfaces
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 916 - 917
Copyright
Copyright © Microscopy Society of America

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References

References:

aWhitehouse, D. J., 1994, Handbook of Surface Metrology, Institute of Physics Publishing, Bristol, ISBN 0-7503-0039-6Google Scholar
2Russ, J. C., 1999, The Image Processing Handbook 3rd ed, CRC Press, Boca Raton, Chapter 11, ISBN 0-8493-2532-3Google Scholar
3Stout, K. J. et al., 1993, The development of methods for the characterisation of roughness in three dimensions, report EUR 15178 EN, European Commission, Brussels, ISBN 0-7044-1313-2Google Scholar