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Automated Analysis of X-Ray Spectrum Images from the STEM

Published online by Cambridge University Press:  02 July 2020

P.G Kotula ,
J.R Michael  and
M.R Keenan
P.G Kotula
Affiliation:
Sandia National Laboratories, Mail Stop 0886, P. O. Box 5800, Albuquerque, NM, 87185-0886
J.R Michael
Affiliation:
Sandia National Laboratories, Mail Stop 0886, P. O. Box 5800, Albuquerque, NM, 87185-0886
M.R Keenan
Affiliation:
Sandia National Laboratories, Mail Stop 0886, P. O. Box 5800, Albuquerque, NM, 87185-0886
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Abstract

For failure analysis and process control it is critical to perform comprehensive microanalysis. The desire to perform this analysis thoroughly but quickly is the ultimate goal. Typical analyses of this sort have been performed by collecting x-ray spectra at points, along lines, by mapping, and more recently by spectrum imaging where a complete x-ray spectrum is collected over a 2D array of points. Spectrum imaging is perhaps of greatest interest for its potential to thoroughly and comprehensively sample a given area of a microstructure. The problem is that the techniques available for analyzing large (> 1000 spectra) spectrum image (SI) data sets have been limited to mapping after the fact and perhaps thresholding the maps and summing the resultant spectra from those pixels. As a result, there is a need for more sophisticated SI analysis tools, capable of reducing the SI to its essence-the chemical components. Software is currently commercially available for the automated analysis of x-ray spectrum images (SIs) from the SEM

Type
Quantitative STEM: Imaging and EELS Analysis Honoring the Contributions of John Silcox (Organized by P. Batson, C. Chen and D. Muller)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 198 - 199
Copyright
Copyright © Microscopy Society of America 2001

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References

references

1.Kotula, P. G. and Keenan, M. R., These Proceedings.Google Scholar
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3. Sandia is a multi-program laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy (DOE) under contract DE-AC04-94AL85000.Google Scholar