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Augmenting the 3D Characterization Capability of the Dual Beam FIB-SEM

Published online by Cambridge University Press:  01 August 2004

Michael D Uchic
Affiliation:
Air Force Research Laboratory, Ohio
Michael Groeber
Affiliation:
Ohio State University
Robert Wheeler IV
Affiliation:
UES, Dayton, Ohio
Frank Scheltens
Affiliation:
UES, Dayton, Ohio
Dennis M Dimiduk
Affiliation:
Air Force Research Laboratory, Ohio
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Copyright
© 2004 Microscopy Society of America

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