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Application of X-Ray Optics to Energy Dispersive Spectroscopy

Published online by Cambridge University Press:  02 July 2020

J. J. McCarthy  and
D. J. McMillan
J. J. McCarthy
Affiliation:
NORAN Instruments Inc., 2551 West Beltline Highway, Middleton, WI, 53562
D. J. McMillan
Affiliation:
NORAN Instruments Inc., 2551 West Beltline Highway, Middleton, WI, 53562
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Extract

The application of x-ray optics for focusing x-rays into high intensity spots or for collimation of x-ray beams has been reported by several authors. Example applications for x-ray optics include microfluorescence, microdiffraction, tomography and lithography, and WDS. Kirkland et al. pointed out that the use of an optic, in a collimating configuration could provide enhanced detection sensitivity in wavelength dispersive spectroscopy. In these proceedings last year, Agnello et al. presented data from a new WDS device specifically designed to use a grazing incidence collimating x-ray optic that confirmed and extended the work of Kirkland.

A few studies have appeared reporting the use X-ray optics in applications using EDS. Focusing x-ray optics have been used on both the excitation and detection side of EDS systems. In a series of papers, Carpenter and his collaborators describe an x-ray microprobe which uses capillary optics to provide an intense convergent beam of x-rays from a microfocus x-ray tube to excite the sample for x-ray microfluorescence studies. Wollman et al.

Type
30 Years of Energy Dispersive Spectrometry in Microanalysis
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 178 - 179
Copyright
Copyright © Microscopy Society of America

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References

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