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Analysis of Silicon Nanowires by Laser Atom Probe Tomography Prepared by a Protected Lift-Out Processing Technique

Published online by Cambridge University Press:  03 August 2008

T Prosa ,
R Alvis ,
L Tsakalakos  and
V Smentkowski
T Prosa
Affiliation:
Imago Scientific Instruments
R Alvis
Affiliation:
Imago Scientific Instruments
L Tsakalakos
Affiliation:
General Electric Global Research
V Smentkowski
Affiliation:
General Electric Global Research
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 456 - 457
Copyright
© 2008 Microscopy Society of America

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