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An Efficient Technique to Quantify Dislocation Densities Imaged Through Annular Dark Field Scanning Transmission Electron Microscopy

Published online by Cambridge University Press:  23 November 2012

C.T. Schamp
Affiliation:
SVTC Technologies, Austin, TX
P.Y. Hung
Affiliation:
Sematech, Albany, NY
B.G. Min
Affiliation:
Sematech, Albany, NY
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2012

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