Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-24T14:35:09.213Z Has data issue: false hasContentIssue false
  • English
  • Français

AES Studies on the Ti/N Compositionally Gradient Film Deposited onto Ti-6Al-4V Alloy by Reactive DC Sputtering

Published online by Cambridge University Press:  14 July 2006

Tsutomu Sonoda ,
Akira Watazu ,
Kiyotaka Katou  and
Tadashi Asahina
Tsutomu Sonoda
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), 2266-98, Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
Akira Watazu
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), 2266-98, Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
Kiyotaka Katou
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), 2266-98, Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
Tadashi Asahina
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), 2266-98, Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
Get access

Abstract

Deposition of Ti/N compositionally gradient film onto Ti-6Al-4V alloy substrates was carried out by reactive DC sputtering, not only to improve the blood compatibility of the alloy but also to relax the stress concentrated at the interface between the film and the alloy substrate. The compositional gradient was realized by varying continuously the nitrogen content in Ar-N2 sputter gas during deposition. In Auger electron spectroscopy (AES) analysis, Auger spectra were acquired in the N(E) mode using the beam brightness modulation (BBM) method to overcome the problem of the peak overlap of the principal Auger nitrogen transition peak (N-KLL) with one of titanium peaks (Ti-LMM). The deposited film appeared to be uniform and adhesive. TiN formation at the surface of the film was assumed, because of its yellow gold color and the X-ray diffraction (XRD) pattern for it. Under scanning electron microscopy, it was found that the surface had fine particles dispersed on a smooth accumulated deposit and that this depositing method improved the structural property of the film at the surface. According to AES in-depth profiles, the nitrogen (N) concentration in the film gradually decreased in the depth direction from the surface toward the alloy, confirming that a Ti/N compositionally gradient film had formed on the alloy substrate.

Keywords

Auger electron spectroscopytitanium nitridesputteringtitanium alloy
Type
MODERN DEVELOPMENTS AND APPLICATIONS IN MICROBEAM ANALYSIS
Information
Microscopy and Microanalysis , Volume 12 , Issue 4 , August 2006 , pp. 356 - 361
Copyright
© 2006 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Finlay, W.L. & Snyder, J.A. (1950). Effects of three interstitial solutes (nitrogen, oxygen, and carbon). Trans AIME 188, 277–286.Google Scholar
Galle, P. (1984). Sur la presence d'aluminium en forte concentration dans les neurons d'un malade decede d'une demence rapidement evolutive. Comptes rendus 299, 536–539.Google Scholar
Jaffee, R.I., Ogden, H.R., & Maykuth, D.J. (1950). Alloys of titanium with carbon, oxygen, and nitrogen. Trans AIME 188, 1261–1266.CrossRefGoogle Scholar
Kato, M. & Sonoda, T. (1991). Sputter deposition of pure titanium onto complete denture base of Ti-6Al-4V deformed by superplastic forming. J Iron Steel Inst Jpn 77, 1206–1212.CrossRefGoogle Scholar
Manory, R. (1987). Effects of deposition parameters on structure and composition of reactively sputtered TiNx films. Surf Eng 3, 233–238.CrossRefGoogle Scholar
Mitamura, Y., Yuhta, T., & Mikami, T. (1987). Ceramic heart valve. High Tech Ceram 1, 127–136.Google Scholar
Numoto, M. (1989). Thickness measurement of photoresist on water by surface measuring instrument. J Surf Finish Soc Jpn 40, 241–247.CrossRefGoogle Scholar
Park, J.Y., Gemmell, C.H., & Davies, J.E. (2001). Platelet interactions with titanium: Modulation of platelet activity by surface topography. Biomaterials 22, 2671–2682.CrossRefGoogle Scholar
Seah, M.P. (1972). Quatitative auger electron spectroscopy and electron ranges. Surf Sci 32, 703–728.CrossRefGoogle Scholar
Sekine, T. & Mogami, A. (1985). Quantitative analysis of complex auger spectra by least-squares fitting with prefiltering of spectra. Surf Interface Anal 7, 289–294.CrossRefGoogle Scholar
Sekine, T., Mogami, A., Kudoh, M., & Hirata, K. (1984). Peak energies and relative sensitivity factors in N(E) auger spectra. Vacuum 34, 631–636.CrossRefGoogle Scholar
Sonoda, T. & Kato, M. (1994). Effects of oxygen flow rate on Ti-O coating on Ti-6Al-4V alloy by reactive DC sputtering. J Surf Finish Soc Jpn 45, 613–618.CrossRefGoogle Scholar
Steinemann, S.G. & Perren, S.M. (1985). Titanium alloys as metallic biomaterials. Titanium Sci Technol 2, 1327–1334.Google Scholar