Hostname: page-component-cd9895bd7-hc48f Total loading time: 0 Render date: 2024-12-25T06:10:18.540Z Has data issue: false hasContentIssue false

Advances in Pulsed-Laser Atom Probe: Instrument and Specimen Design for Optimum Performance

Published online by Cambridge University Press:  14 November 2007

Joseph H. Bunton
Affiliation:
Imago Scientific Instruments Corporation, Madison, WI 53711-4951, USA
Jesse D. Olson
Affiliation:
Imago Scientific Instruments Corporation, Madison, WI 53711-4951, USA
Daniel R. Lenz
Affiliation:
Imago Scientific Instruments Corporation, Madison, WI 53711-4951, USA
Thomas F. Kelly
Affiliation:
Imago Scientific Instruments Corporation, Madison, WI 53711-4951, USA
Get access

Abstract

The performance of the pulsed-laser atom probe can be limited by both instrument and specimen factors. The experiments described in this article were designed to identify these factors so as to provide direction for further instrument and specimen development. Good agreement between voltage-pulsed and laser-pulsed data is found when the effective pulse fraction is less than 0.2 for pulsed-laser mode. Under the conditions reported in this article, the thermal tails of the peaks in the mass spectra did not show any significant change when produced with either a 10-ps or a 120-fs pulsed-laser source. Mass resolving power generally improves as the laser spot size and laser wavelength are decreased and as the specimen tip radius, specimen taper angle, and thermal diffusivity of the specimen material are increased. However, it is shown that two of the materials used in this study, aluminum and stainless steel, depend on these factors differently. A one-dimensional heat flow model is explored to explain these differences. The model correctly predicts the behavior of the aluminum samples, but breaks down for the stainless steel samples when the tip radius is large. A more accurate three-dimensional model is needed to overcome these discrepancies.

Type
Research Article
Copyright
© 2007 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Asheghi, M., Kurabayashi, K., Kasnavi, R. & Goodson, K.E. (2002). Thermal conduction in doped single-crystal silicon films. J Appl Phys 91, 50795088.CrossRefGoogle Scholar
Asheghi, M., Touzelbaev, M.N., Goodson, K.E., Leung, Y.K. & Wong, S.S. (1998). Temperature-dependent thermal conductivity of single-crystal silicon layers in SOI substrates. J Heat Transf 120, 223241.CrossRefGoogle Scholar
Cerezo, A. & Smith, G.D.W. (1987). The effect of pulse shape on mass resolution in the pulsed-laser atom probe. J Phys E 20, 13921394.CrossRefGoogle Scholar
Cerezo, A., Smith, G.D.W. & Clifton, P.H. (2006). Measurement of temperature rises in the femtosecond laser pulsed three-dimensional atom probe. Appl Phys Lett 88, 154103.CrossRefGoogle Scholar
Crozier, K.B., Sundaramurthy, A., Kino, G.S. & Quate, C.F. (2003). Optical antennas: Resonators for local field enhancement. J Appl Phys 94, 46324642.CrossRefGoogle Scholar
Deconihout, B., Vurpillot, F., Gault, B., Da Costa, G., Bouet, M. & Bostel, A. (2004). Toward a LaWaTAP: Laser assisted wide angle tomographic atom probe. In 49th International Field Emission Symposium, Seggau Castle, Austria, pp. 278282. Sussex, UK: John Wiley and Sons, Ltd.
Eesley, G.L. (1983). Observation of nonequilibrium electron heating in copper. Phys Rev Lett 51, 2140.CrossRefGoogle Scholar
Gault, B., Vurpillot, F., Bostel, A., Menand, A. & Deconihout, B. (2005). Estimation of the tip field enhancement on a field emitter under laser illumination. Appl Phys Lett 86, 094101.CrossRefGoogle Scholar
Holland, M.G. (1963). Analysis of lattice thermal conductivity. Phys Rev 132, 24612471.CrossRefGoogle Scholar
Kadlec, F., Kuzel, P. & Coutaz, J.-L. (2004). Optical rectification at metal surfaces. Opt Lett 29, 2674.CrossRefGoogle Scholar
Kadlec, F., Kuzel, P. & Coutaz, J.-L. (2005). Study of terahertz radiation generated by optical rectification on thin gold films. Opt Lett 30, 1402.CrossRefGoogle Scholar
Kellogg, G.L. (1981). Determining the field emitter temperature during laser irradiation in the pulsed laser atom probe. J Appl Phys 52, 53205328.CrossRefGoogle Scholar
Kellogg, G.L. & Tsong, T.T. (1980). Pulsed-laser atom-probe field-ion microscopy. J Appl Phys 51, 11841192.CrossRefGoogle Scholar
Kelly, T.F., Zreiba, N.A., Howell, B.D. & Bradley, F.G. (1991). Energy deposition and heat transfer in pulse-heated field emission tip at high repetition rates. Surf Sci 246, 377385.CrossRefGoogle Scholar
Li, D., Wu, Y., Fan, R., Yang, P. & Majumdar, A. (2003). Thermal conductivity of Si/SiGe superlattice nanowires. Appl Phys Lett 83, 31863188.CrossRefGoogle Scholar
Lide, D.R. (1996). CRC Handbook of Chemistry and Physics. New York: CRC Press.
Liu, H.F., Liu, H.M. & Tsong, T.T. (1986). Numerical calculation of the temperature distribution and evolution of the field-ion emitter under pulsed and continuous-wave laser irradiation. J Appl Phys 59, 13341340.CrossRefGoogle Scholar
Maznev, A.A., Hohlfeld, J. & Gudde, J. (1997). Surface thermal expansion of metal under femtosecond laser irradiation. J Appl Phys 82, 50825085.CrossRefGoogle Scholar
Miller, M.K., Cerezo, A., Hetherington, M.G. & Smith, G.D.W. (Eds.) (1996). Atom Probe Field Ion Microscopy. Oxford: Oxford University Press.
Müller, E.W. (1956). Field desorption. Phys Rev 102, 618.CrossRefGoogle Scholar
Park, H., Wang, X., Nie, S., Clinite, R. & Cao, J. (2005). Mechanism of coherent acoustic phonon generation under nonequilibrium conditions. Phys Rev B 72, 100301(R).CrossRefGoogle Scholar
Pippard, A.B. (1947). The surface impedance of superconductors and normal metals at high frequencies. 2. The anomolous skin effect in metals. Proc Roy Soc A 191, 385399.Google Scholar
Seidman, D.N. & Scanlan, R.M. (1971). On the heating of a field ion microscope specimen. Philos Mag 23, 1429.CrossRefGoogle Scholar
Tsong, T.T. (1984). Pulsed-laser-stimulated field ion emission from metal and semiconductor surfaces: A time-of-flight study of the formation of atomic, molecular, and cluster ions. Phys Rev B 30, 49464960.CrossRefGoogle Scholar
Tsong, T.T., McLane, S.B. & Kinkus, T.J. (1982). Pulsed-laser time-of-flight atom-probe field ion microscope. Rev Sci Instrum 53, 14421448.CrossRefGoogle Scholar
Vella, A., Gilbert, M., Hideur, A., Vurpillot, F. & Deconihout, B. (2006a). Ultrafast ion emission from a metallic tip excited by femtosecond laser pulses. Appl Phys Lett 89, 13.Google Scholar
Vella, A., Vurpillot, F., Gault, B., Menand, A. & Deconihout, B. (2006b). Evidence of field evaporation assisted by nonlinear optical rectification induced by ultrafast laser. Phys Rev B 73, 165416.Google Scholar
Vurpillot, F., Gault, B., Vella, A., Bouet, M. & Deconihout, B. (2006). Estimation of the cooling times for a metallic tip under laser illumination. Appl Phys Lett 88, 094105.CrossRefGoogle Scholar

Bunton et al

Figure 7. The effect of laser spot size on the cooling rate of the specimen and, hence, the effect of laser spot size on mass resolution.

Download Bunton et al(Video)
Video 2.6 MB