Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-28T20:21:26.522Z Has data issue: false hasContentIssue false
  • English
  • Français

Advanced Microscopy for the Semiconductor Industry

Published online by Cambridge University Press:  01 August 2004

Alain C. Diebold ,
Brendan Foran ,
Tobias Hanrath  and
Brian Korgel
Alain C. Diebold
Affiliation:
International SEMATECH, Austin, Texas
Brendan Foran
Affiliation:
International SEMATECH, Austin, Texas
Tobias Hanrath
Affiliation:
University of Texas Austin
Brian Korgel
Affiliation:
University of Texas Austin
Get access

Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 526 - 527
Copyright
© 2004 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)