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3D Microscopy and Microanalysis of Au-Al Ultrasonic Bonds by Specific Ion Beam Processing Steps and Scanning Electron Microscopy

Published online by Cambridge University Press:  01 August 2004

Wolfgang Hauffe ,
Andrzej Bochenek ,
Marian Lukaszewicz ,
Enrico Langer  and
R. J. Mitro
Wolfgang Hauffe
Affiliation:
Dresden University of Technology, Germany
Andrzej Bochenek
Affiliation:
Wroclaw University of Technology, Poland
Marian Lukaszewicz
Affiliation:
Wroclaw University of Technology, Poland
Enrico Langer
Affiliation:
Dresden University of Technology, Germany
R. J. Mitro
Affiliation:
Gatan R&D, Pleasanton, California
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1156 - 1157
Copyright
© 2004 Microscopy Society of America

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