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3D Elemental Mapping Using a Dedicated FIB/STEM System

Published online by Cambridge University Press:  01 August 2004

Toshie Yaguchi ,
Mitsuru Konno ,
Takeo Kamino ,
Takahito Hashimoto ,
Tsuyoshi Ohnishi  and
Masashi Watanabe
Toshie Yaguchi
Affiliation:
Hitachi Science Systems, Japan
Mitsuru Konno
Affiliation:
Hitachi Science Systems, Japan
Takeo Kamino
Affiliation:
Hitachi Science Systems, Japan
Takahito Hashimoto
Affiliation:
Hitachi High-Technologies Corporation, Japan
Tsuyoshi Ohnishi
Affiliation:
Hitachi High-Technologies Corporation, Japan
Masashi Watanabe
Affiliation:
Lehigh University, Bethlehem, Pennsylvania
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1030 - 1031
Copyright
© 2004 Microscopy Society of America

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