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3D EDX microanalysis by FIB-SEM: Elemental quantification enhancement

Published online by Cambridge University Press:  23 November 2012

P. Burdet ,
M. Cantoni  and
C. Hébert
P. Burdet
Affiliation:
CIME, EPFL, Lausanne, Switzerland
M. Cantoni
Affiliation:
CIME, EPFL, Lausanne, Switzerland
C. Hébert
Affiliation:
CIME, EPFL, Lausanne, Switzerland
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 526 - 527
Copyright
Copyright © Microscopy Society of America 2012

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