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3D characterization and metrology of nanostructures by electron tomography

Published online by Cambridge University Press:  03 August 2008

JC Hernandez ,
AB Hungria ,
JA Perez-Omil ,
MS Moreno ,
EA Coronado ,
G Cempura ,
A Kruk  and
PA Midgley
JC Hernandez
Affiliation:
University of Cambridge, United Kingdom
AB Hungria
Affiliation:
University of Cambridge, United Kingdom
JA Perez-Omil
Affiliation:
Universidad de Cadiz, Spain
MS Moreno
Affiliation:
Centro Atomico Bariloche, Argentina
EA Coronado
Affiliation:
Universidad Nacional de Cordoba, Argentina
G Cempura
Affiliation:
AGH University of Science and Technology, Poland
A Kruk
Affiliation:
AGH University of Science and Technology, Poland
PA Midgley
Affiliation:
University of Cambridge, United Kingdom
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 284 - 285
Copyright
© 2008 Microscopy Society of America

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