Hostname: page-component-78c5997874-ndw9j Total loading time: 0 Render date: 2024-11-05T03:26:30.571Z Has data issue: false hasContentIssue false
  • English
  • Français

About the Mechanisms of Charging in EPMA, SEM, and ESEM with Their Time Evolution

Published online by Cambridge University Press:  01 December 2004

Jacques Cazaux
Jacques Cazaux
Affiliation:
Laboratoire d'Analyse des Solides Surfaces et Interfaces, Faculté des Sciences, Boite Postale 1039, 51687 Reims Cedex 2, France
Get access

Abstract

The physical mechanisms involved in electron irradiation of insulating specimens are investigated by combining some simple considerations of solid-state physics (trapping mechanisms of electrons and secondary electron emission) with basic equations of electrostatics. To facilitate the understanding of the involved mechanisms only widely irradiated samples having a uniform distribution of trapping sites are considered. This starting hypothesis allows development of simple models for the trapped charge distributions in ground-coated specimens as investigated in electron probe microanalysis (EPMA) as well as for the bare specimens investigated in scanning electron microscopy (SEM) and environmental SEM (ESEM). Governed by self-regulation processes, the evolution of the electric parameters during the irradiation are also considered for the first time and practical consequences in EPMA, SEM, and ESEM are deduced. In particular, the widespread idea that the noncharging condition of SEM is obtained at a critical energy E2 (where δ + η = 1 with δ and η yields obtained in noncharging experiments) is critically discussed.

Keywords

insulating materialschargingEPMASEMESEMsecondary electron emissionirradiation effects
Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue 6 , December 2004 , pp. 670 - 684
Copyright
© 2004 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Autefage, F. & Couderc, J.J. (1980). Etude du mecanisme de la migration du sodium et du potassium au cours de leur analyse à la microsonde electronique. Bulletin de Mineralogie 103, 623–629.Google Scholar
Bastin, G.F. & Heijligers, H.J.M. (1991). Nonconductive specimens in the electron probe microanalyzer—A hitherto poorly discussed problem. In Electron Probe Quantitation, Heinrich, K.F.J. & Newbery, D.E. (Eds.), pp. 163–175. New York: Plenum Press.
Belhaj, M., Jbara, O., Msellak, K., Rau, E.I., & Andrianov, M.V. (2000). An anomalous contrast. Scanning electron microscopy of insulators: The psuedo mirror effect. Scanning 22, 282–356.Google Scholar
Belhaj, M., Jbara, O., Filippov, M.N., Rau, E.I., & Andrianov, M.V. (2001). Analysis of two methods of measurement of surface potential of insulators in SEM: Electron spectroscopy and X-ray spectroscopy methods. Appl Surf Sci 177, 58–65.Google Scholar
Brunner, M. & Schmid, R. (1986). Charging effects in low voltage scanning electron metrology. Scanning Electron Microsc II, 377–382.Google Scholar
Cazaux, J. (1986a). Some considerations on the electric field induced in insulators by electron bombardment. J Appl Phys 59, 1418–1430.Google Scholar
Cazaux, J. (1986b) Electrostatics of insulators charged by incident electron beams. J Microsc Spectrosc Electroniques 11, 293–312.Google Scholar
Cazaux, J. (1996). Electron probe microanalysis of insulating materials. X-Ray Spectrom 25, 265–280.Google Scholar
Cazaux, J. (1999a). Some considerations on the secondary electron emission from e− irradiated insulators. J Appl Phys 85, 1137–1147.Google Scholar
Cazaux, J. (1999b). Mechanisms of charging in electron spectroscopy. J Electron Spectrosc Rel Phen 105, 155–185.Google Scholar
Cazaux, J. (2000). About the charge compensation of insulating samples in XPS. J Electron Spectrosc Rel Phen 113, 15–33.Google Scholar
Cazaux, J. (2001a). Correlation between the x-ray-induced and the electron-induced electron emission yield of insulators. J Appl Phys 89, 8265–8272.Google Scholar
Cazaux, J. (2001b). About the secondary electron yield and the sign of charging of electron irradiated insulators. Euro Phys J Appl Phys 15, 167–172.Google Scholar
Cazaux, J. (2002). A new analytical approach for the transport and the emission yield of secondary electrons from insulators. Nucl Instrum Methods Phys Res B 192, 381–392.Google Scholar
Cazaux, J. (2004). Scenario for time evolution of insulator charging under various focused electron irradiation. Appl Phys 95, 731–743.Google Scholar
DiMaria, D.J., Cartier, E., & Arnold, D. (1993). Impact ionization, trap creation, degradation and breakdown in silicon dioxide films on silicon. J Appl Phys 73, 3367–3384.Google Scholar
Glavatskikh, I.A., Kortov, V.S., & Fitting, H.J. (2001). Self-consistent electric charging of insulating layers and metal/oxide/semiconductor structures. J Appl Phys 89, 440–448.Google Scholar
Goldstein, J.I., Newbury, D., Echlin, P., Joy, D.C., Romig, A.D., Lyman, C.E., & Lifshin, E. (1992). SEM microcharacterization of semiconductors. In Scanning Electron Microscopy and X-Ray Microanalysis, pp. 45–77. London: Plenum Press.
Griffin, B.J. (2000). Charge contrast imaging of crystal growth and defects in ESEM. Scanning 22, 234–242.Google Scholar
Grillon, F. & Cazaux, J. (2000). Charging effects in SEM: Role of the working distance. In Proceedings of EUREM XII, Brno, July 2000, Tomanek, P. & Kolarik, R. (Eds.), vol. 3, pp. 229–230. Brno, The Czech Republic: Czech Society for Electron Microscopy.
Gross, B., Sessler, G.M., & West, J.E. (1974). Charge dynamics for electron-irradiated polymer-foil electrets. J Appl Phys 45, 2841–2851.Google Scholar
Heinrich, K.F.G. & Newbury, D.E. (Eds.). (1991). Electron Probe Quantitation. New York: Plenum Press.
Hesto, P. (1986). The nature of electronic conduction in thin insulating layers. In Instabilities in Silicon Devices, Barbottin, G. & Vapaille, A. (Eds.), pp. 267–312. New York: Elsevier.
Iwata, S. & Ishizaka, A. (1996). Electron spectroscopic analysis of the SiO2/Si system. J Appl Phys 79, 6653–6713.Google Scholar
Jbara, O., Cazaux, J., & Trebbia, P. (1995). Sodium diffusion in glasses. J Appl Phys 78, 868–875.Google Scholar
Jbara, O., Fakhfakh, S., Belhadj, M., Cazaux, J., Rau, E.I., Filippov, M., & Andrianov, M. (2002). A new experimental approach for characterizing the internal trapped charge in ground coated insulators during their e irradiation. Nucl Instrum Methods Phys Res B 194, 302–310.Google Scholar
Jbara, O., Fakhfakh, S., Belhaj, M., & Rondot, S. (2004). Charge implantation measurement on electron-irradiated insulating materials by means of an SEM technique. Microsc Microanal 10, 697–710 (this issue).Google Scholar
Jbara, O., Potron, B., Mouze, D., & Cazaux, J. (1997). Electron probe microanalysis of insulating oxides: Monte Carlo simulations. X-Ray Spectrom 26, 291–302.Google Scholar
Joy, D.C. (1987). A model for calculating secondary and backscattered electron yields. J Microsc 147, 51–64.Google Scholar
Joy, D.C. & Joy, C.S. (1996). Low voltage scanning electron microscopy. Micron 27, 247–263.Google Scholar
Jurek, K., Gedeon, O., & Hulinsky, V. (1998). Potassium migration in silica glasses during electron beam irradiation. Mikrochemica Acta (Suppl.) 15, 269–272.Google Scholar
Kanaya, K. & Okayama, S. (1972). Penetration and energy-loss theory of electrons in solid targets. J Phys D Appl Phys 5, 43–58.Google Scholar
Kearns, S.L., Steen, N., & Erlund, E. (2002). Electron probe microanalysis of volcano glasses at cryogenic temperatures. Microsc Microanal 8 (Suppl. 2), 1562–1563.Google Scholar
Kotera, M. & Suga, H. (1988). A simulation of keV electron scattering in a charged-up specimen. J Appl Phys 63, 261–269.Google Scholar
Lenzlinger, M. & Snow, E.H. (1969). Fowler Nordheim tunneling into thermally grown SiO2. J Appl Phys 40, 278–283.Google Scholar
Mainwood, A. (2000). Recent developments of diamond detectors for particles and UV radiation. Semicond Sci Technol 15, R55–R63.Google Scholar
Moncrieff, D.A., Robinson, V.N.E., & Harris, L.B. (1978). Charge neutralisation of insulating surface in the SEM by gas ionisation. J Phys D Appl Phys 11, 2315–2325.Google Scholar
Regnier, P., Serruys, Y., & Zemskoff, A. (1986). Electric field stimulated sodium depletion of glass. Phys Chem Glasses 27, 185–189.Google Scholar
Reimer, L. (1985). Specimen heating and damage. In Scanning Electron Microscopy, Springer Series in Optical Science, Hawkes, P. (Ed.), vol. 42, pp. 117–127. Berlin: Springer Verlag.
Reimer, L., Golla, U., Bongeler, R., Kassens, M., Schindler, B., & Senkel, R. (1992). Charging of bulk specimens insulating layers and free-supporting films in scanning electron microscopy. Optik 92, 14–22.Google Scholar
Saito, Y., Michizono, S., Sato, T., Kobayashi, S., & Jardin, C. (1998). Annealing effects on secondary electron emission and charging of alumina ceramics. Proceedings of the Third International Conference on Electric Charges, CSC3, Damame, G. (Ed.), pp. 382–390. Paris: Société Française du Vide Paris.
Seiler, H. (1983). Secondary electron emission in the scanning electron microscope. J Appl Phys 54, R1–R18.Google Scholar
Thiel, B.L., Toth, M., & Craven, J.P. (2004). Charging processes in low vacuum scanning electron microscopy. Microsc Microanal 10, 711–720 (this issue).Google Scholar
Toth, M., Philips, M.R., Craven, J.P., Thiel, B.L., & Donald, A.M. (2002a). Electric fields produced by electron irradiation of insulators in a low vacuum environment. J Appl Phys 91, 4492–4499.Google Scholar
Toth, M., Phillips, M.R., Thiel, B.L., & Donald, A.M. (2002b). Electron imaging of dielectrics under simultaneous electron− irradiation. J Appl Phys 91, 4479–4491.Google Scholar
Treheux, D., Bigarré, J., & Fayeulle, S. (1999). Dielectric aspects of the ceramic tribology. Proceedings of the Ninth Cimtec-World Ceramics Congress, Part A, Advances in Science and Technology, vol. 13, pp. 563–574.
Vance, D.W. (1971). Surface charging of insulators by ion irradiation. J Appl Phys 42, 5430–5443.Google Scholar
Walker, T.M. & Howitt, D.G. (1989). Field-induced migration of sodium in soda silicate glasses during SEM. Scanning 11, 5–11.Google Scholar