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Aberration Correction System Using Segmented Detector in STEM

Published online by Cambridge University Press:  23 September 2015

Y. Kohno ,
H. Sawada  and
N. Shibata
Y. Kohno
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
H. Sawada
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
N. Shibata
Affiliation:
Institute of Engineering Innovation, School of Engineering, the University of Tokyo, Tokyo 116-0013, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 341 - 342
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1] Krivanek, O. L., et al., Ultramicroscopy. 78 (1999) 1.CrossRefGoogle Scholar
[2] Shibata, N., et al., J. Electron Microsc. 59 (2010) 473.CrossRefGoogle Scholar
[3] We thank Prof. Y. Ikuhara, the University of Tokyo for his continuous support. This development was supported by SENTAN, JST..Google Scholar