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Aberration Corrected Lattice Imaging With Sub Ångstrom Resolution

Published online by Cambridge University Press:  02 July 2020

C. Kisielowski ,
E.C. Nelson ,
C. Song ,
R. Kilaas ,
A. Schwartzman  and
A. Thust
C. Kisielowski
Affiliation:
National Center for Electron Microscopy, One Cyclotron Rd., Berkeley, CA94720/ USA
E.C. Nelson
Affiliation:
National Center for Electron Microscopy, One Cyclotron Rd., Berkeley, CA94720/ USA
C. Song
Affiliation:
National Center for Electron Microscopy, One Cyclotron Rd., Berkeley, CA94720/ USA
R. Kilaas
Affiliation:
National Center for Electron Microscopy, One Cyclotron Rd., Berkeley, CA94720/ USA
A. Schwartzman
Affiliation:
Brown University, Division of Engineering, 182 Hope Street, Providence, RI02912/ USA
A. Thust
Affiliation:
Institut f. Festkoerperforschung, Forschungszentrum Juelich GmbH, D-52425 / Germany
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Extract

In 1999 NCEM's One Ångstrom Microscope (OAM) became fully operational. The OAM is a Philips CM300 FEG/UT field emission microscope with holographic capabilities that is equipped with a Gatan Image Filter (GIF) and operates at 300 kV. It was designed to reach a resolution close to the “magic barrier” around one Ångstrom (100 pm) by combining mid voltage technology with advanced computer processing [1,2]. Ahardware correction of the three-fold astigmatism allows for aberration free imaging down to sub Ångstrom values [3]. In this contribution it will be shown that the instrument's performance exceeded expectations because sub Ångstrom resolution can be achieved by reconstructing electron exit waves from focal series [4].

Figure la depicts a simulated [110] lattice image of a 90° partial dislocation in silicon. Tersoff potentials were used to calculate the exact atomic positions around dislocations with different core structures [5].

Type
Sir John Meurig Thomas Symposium: Microscopy and Microanalysis in the Chemical Sciences
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 16 - 17
Copyright
Copyright © Microscopy Society of America

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References

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