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Aberration Corrected Analytical Scanning and Transmission Electron Microscope for High-Resolution Imaging and Analysis for Multi-User Facilities

Published online by Cambridge University Press:  25 July 2016

H. Inada
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
Y. Taniguchi
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
T. Yotsuji
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
Y. Hirayama
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
T. Dobashi
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
K. Watanabe
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
H. Kikuchi
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
H. Muto
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
K. Nakamura
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
T. Ohnishi
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
W. Shimoyama
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
D. Terauchi
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
M. Sakamaki
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
T. Ooyagi
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
H. Mise
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
H. Matsumoto
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan
M. Konno
Affiliation:
Science & Medical Systems Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki ,Japan

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2016 

References

References:

[1] Zhu, Y., Inada, H., Nakamura, K. & Wall, J. Nature Mater 8, 808812, 2009.Google Scholar
[2] Fiori, C. E., et al, Principles of Analytical Electron Microscopy. Plenum Press.Google Scholar