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3D Composition Imaging Using a Dedicated FIB/STEM System

Published online by Cambridge University Press:  01 August 2005

T Yaguchi ,
M Konno ,
T Kamino ,
K Kaji ,
T Ohnishi  and
M Watanabe
T Yaguchi
Affiliation:
Hitachi Science Systems, Japan
M Konno
Affiliation:
Hitachi Science Systems, Japan
T Kamino
Affiliation:
Hitachi Science Systems, Japan
K Kaji
Affiliation:
Hitachi High-Technologies, Japan
T Ohnishi
Affiliation:
Hitachi High-Technologies, Japan
M Watanabe
Affiliation:
Lehigh University, Bethlehem, Pennsylvania

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 630 - 631
Copyright
© 2005 Microscopy Society of America