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2D Evaluation of the Potential Difference in an InP Device by Shadow Image Distortion Method

Published online by Cambridge University Press:  30 July 2020

Katsuhiro Sasaki  and
Hirokazu Sasaki
Katsuhiro Sasaki
Affiliation:
UACJ Coporation, Nagoya, Aichi, Japan
Hirokazu Sasaki
Affiliation:
Furukawa Electric Co. Ltd., Yokohama, Kanagawa, Japan

Abstract

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Type
Direct Phase Imaging with Coherent Electron Beam in TEM
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1952 - 1954
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Copyright
Copyright © Microscopy Society of America 2020

References

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