2 keV Ga+ FIB Milling for Reducing Amorphous Damage in Silicon

L A Giannuzzi; R Geurts; J Ringnalda

doi:10.1017/S1431927605507797

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Crossref Citations

This article has been cited by the following publications. This list is generated based on data provided by Crossref.

Bals, Sara Tirry, Wim Geurts, Remco Yang, Zhiqing and Schryvers, Dominique 2007. High-Quality Sample Preparation by Low kV FIB Thinning for Analytical TEM Measurements. Microscopy and Microanalysis, Vol. 13, Issue. 2, p. 80.

Stokes, Debbie J Roussel, Laurent Wilhelmi, Oliver Giannuzzi, Lucille A and Hubert, Dominique HW 2007. Recent Advances in FIB Technology for Nano-prototyping and Nano-characterisation. MRS Proceedings, Vol. 1020, Issue. ,

Zelaya, Eugenia and Schryvers, Dominique 2011. Reducing the formation of FIB‐induced FCC layers on Cu‐Zn‐Al austenite. Microscopy Research and Technique, Vol. 74, Issue. 1, p. 84.

Grandfield, Kathryn Palmquist, Anders Engqvist, Håkan and Thomsen, Peter 2012. Resolving the CaP-bone interface. Biomatter, Vol. 2, Issue. 1, p. 15.

BASSIM, N.D. DE GREGORIO, B.T. KILCOYNE, A.L.D. SCOTT, K. CHOU, T. WIRICK, S. CODY, G. and STROUD, R.M. 2012. Minimizing damage during FIB sample preparation of soft materials. Journal of Microscopy, Vol. 245, Issue. 3, p. 288.

Nakanishi, Nobuto Arie, Hiroyuki Kunimune, Yorinobu Ide, Takashi Hirose, Yukinori Hattori, Nobuyoshi and Koyama, Toru 2012. Study of strain fields caused by crystallization of boron doped amorphous silicon using scanning transmission electron microscopy convergent beam electron diffraction method. Journal of Applied Physics, Vol. 112, Issue. 4,

Fox, Daniel Chen, Yanhui Faulkner, Colm C and Zhang, Hongzhou 2012. Nano-structuring, surface and bulk modification with a focused helium ion beam. Beilstein Journal of Nanotechnology, Vol. 3, Issue. , p. 579.

Schaffer, Miroslava Schaffer, Bernhard and Ramasse, Quentin 2012. Sample preparation for atomic-resolution STEM at low voltages by FIB. Ultramicroscopy, Vol. 114, Issue. , p. 62.

Walton, Marc Trentelman, Karen Cummings, Marvin Poretti, Giulia Maish, Jeff Saunders, David Foran, Brendan Brodie, Miles Mehta, Apurva and Vandiver, P. 2013. Material Evidence for Multiple Firings of Ancient Athenian Red‐Figure Pottery. Journal of the American Ceramic Society, Vol. 96, Issue. 7, p. 2031.

Converse, Matthew I. and Fullwood, David T. 2013. Enhancing nanoscale SEM image segmentation and reconstruction with crystallographic orientation data and machine learning. Materials Characterization, Vol. 83, Issue. , p. 109.

Niu, Rongmei and Han, Ke 2013. Cross‐section metal sample preparations for transmission electron microscopy by electro‐deposition and electropolishing. Microscopy Research and Technique, Vol. 76, Issue. 5, p. 476.

Branson, Oscar Redfern, Simon A.T. Tyliszczak, Tolek Sadekov, Aleksey Langer, Gerald Kimoto, Katsunori and Elderfield, Henry 2013. The coordination of Mg in foraminiferal calcite. Earth and Planetary Science Letters, Vol. 383, Issue. , p. 134.

Siemons, W. Beekman, C. Fowlkes, J. D. Balke, N. Tischler, J. Z. Xu, R. Liu, W. Gonzales, C. M. Budai, J. D. and Christen, H. M. 2014. Focused-ion-beam induced damage in thin films of complex oxide BiFeO3. APL Materials, Vol. 2, Issue. 2,

Druckmüllerová, Zdena Kolíbal, Miroslav Vystavěl, Tomáš and Šikola, Tomáš 2014. Toward Site-Specific Dopant Contrast in Scanning Electron Microscopy. Microscopy and Microanalysis, Vol. 20, Issue. 4, p. 1312.

Banerjee, Sayanti Muehle, Uwe Löffler, Markus Heinzig, Andre Trommer, Jens and Zschech, Ehrenfried 2015. Preparation and characterization of silicon nanowires using SEM/FIB and TEM. International Journal of Materials Research, Vol. 106, Issue. 7, p. 697.

LEE, MIN‐HEE and KIM, KYOU‐HYUN 2016. Post‐thinning using Ar ion‐milling system for transmission electron microscopy specimens prepared by focused ion beam system. Journal of Microscopy, Vol. 261, Issue. 3, p. 243.

Banerjee, Sayanti Löffler, Markus Muehle, Uwe Berent, Katarzyna Heinzig, André Trommer, Jens Weber, Walter and Zschech, Ehrenfried 2016. TEM Study of Schottky Junctions in Reconfigurable Silicon Nanowire Devices. Advanced Engineering Materials, Vol. 18, Issue. 2, p. 180.

Narita, Hideki Ikhlas, Muhammad Kimata, Motoi Nugroho, Agustinus Agung Nakatsuji, Satoru and Otani, YoshiChika 2017. Anomalous Nernst effect in a microfabricated thermoelectric element made of chiral antiferromagnet Mn3Sn. Applied Physics Letters, Vol. 111, Issue. 20,

Drezner, Yariv Greenzweig, Yuval Tan, Shida Livengood, Richard H. and Raveh, Amir 2017. High resolution TEM analysis of focused ion beam amorphized regions in single crystal silicon—A complementary materials analysis of the teardrop method. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 35, Issue. 1, p. 011801.

Binkley, Dakota M. and Grandfield, Kathryn 2018. Advances in Multiscale Characterization Techniques of Bone and Biomaterials Interfaces. ACS Biomaterials Science & Engineering, Vol. 4, Issue. 11, p. 3678.

Download full list

Article contents

2 keV Ga+ FIB Milling for Reducing Amorphous Damage in Silicon

Extract

Save article to Kindle

Save article to Dropbox

Save article to Google Drive

Reply to: Submit a response

Your details

You have entered the maximum number of contributors

Conflicting interests