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Semiempirical method for calculation of secondary electron emission coefficients of insulating materials using their spectra of x-ray photoelectron spectroscopy

Published online by Cambridge University Press:  31 January 2011

Tae Wook Heo ,
Sung Hwan Moon ,
Sun Young Park ,
Jae Hyuk Kim  and
Hyeong Joon Kim
Tae Wook Heo
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea
Sung Hwan Moon
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea; and Samsung SDI Corporate R&D Center, Gongse-dong, Kiheung-gu, Youngin-City, Gyenggi Province 446-577, Korea
Sun Young Park
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea
Jae Hyuk Kim*
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea; and Samsung SDI Corporate R&D Center, Gongse-dong, Kiheung-gu, Youngin-City, Gyenggi Province 446-577, Korea
Hyeong Joon Kim
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea; and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

The importance of the secondary electron emission of the protective layer in the alternating current plasma display panels is widely known. However, the difficulty in measuring the secondary electron emission coefficients (γ) of insulating materials has hampered efforts to obtain accurate estimates of their values. To overcome the difficulty of direct measurement, we devised a calculating γ using the spectra of x-ray photoelectron spectroscopy (XPS) and a well-defined theory. The XPS spectra of the valence and core bands of MgO, Al2O3, and Y2O3 films, which were deposited by e-beam evaporation, were measured. Calculations of the γ values were conducted for the case when gas ions such as He, Ne, Ar, and Xe slowly approach the solid surface.

Keywords

X-ray photoelectron spectroscopy (XPS)Insulator
Type
Articles
Information
Journal of Materials Research , Volume 22 , Issue 11 , November 2007 , pp. 3178 - 3185
Copyright
Copyright © Materials Research Society 2007

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References

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