Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-28T13:04:45.819Z Has data issue: false hasContentIssue false
  • English
  • Français

Broadband sub-THz spectroscopy modules integrated in 65-nm CMOS technology

Published online by Cambridge University Press:  09 June 2017

Marion K. Matters-Kammerer ,
Dave Van Goor  and
Lorenzo Tripodi
Marion K. Matters-Kammerer*
Affiliation:
Mixed-Signal Microelectronics, Electrical Engineering, Eindhoven University of Technology, Eindhoven, The Netherlands
Dave Van Goor
Affiliation:
Philips Lighting Research, High Tech Campus 7, Eindhoven, The Netherlands
Lorenzo Tripodi
Affiliation:
Was with Philips Group Innovation, Research, Eindhoven. He is now with ASML Development & Engineering, Eindhoven, The Netherlands
*
Corresponding author: M. K. Matters-Kammerer Email: [email protected]
Get access Rights & Permissions [Opens in a new window]

Abstract

The design and characterization of a broadband 20–480 GHz continuously tuneable on-chip spectrometer based on non-linear transmission lines in 65-nm CMOS technology is presented. The design procedure of the sampler that detects the ultra-broadband signal from the transmitter in time and frequency domain is described in detail. It consists of a non-linear transmission line, a passive pulse differentiator and a high-speed sample and hold-circuit. The relevance of the layout of the Schottky diodes in the sampler with a maximum RC-cutoff frequency of 430 GHz is described. Time domain and frequency domain measurements are presented to characterize the 480 GHz sampler bandwidth as well as the 3.1 ps sampler rise time. A signal to noise ratio of 90 dB at 100 GHz, 70 dB at 200 GHz and more than 30 dB at 480 GHz is reached. Two implementation of the spectrometer with antennas are presented, one with an on-chip antenna and one in a hybrid package. The antenna-less on-chip implementation of the transmitter and sampler requires no external lenses and is miniaturized to an area of 3 mm2. Future applications include analysis of fluids in microfluidic packages or droplet analysis in bio-medical or pharmaceutical applications.

Keywords

Circuit design and applicationsCharacterization of material parameters
Type
Research Papers
Information
International Journal of Microwave and Wireless Technologies , Volume 9 , Special Issue 6: EuMW 2016 Special Issue , July 2017 , pp. 1211 - 1218
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2017 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Siegel, P.H.: Terahertz technology in biology and medicine. IEEE Trans. Microw. Theory Tech., 52 (10) (2004), 2438–2447.Google Scholar
[2] Berrier, A. et al. : Detection of deep-subwavelength dielectric layers at terahertz frequencies using semiconductor plasmonic resonators. Opt. Express, 20 (2012), 5052–5060.CrossRefGoogle ScholarPubMed
[3] Siegel, P.H.; Tang, A.; Virbila, G.; Yanghyo, K.; Chang, M.C.F.; Pikov, V.: Compact non-invasive millimeter-wave glucose sensor, in 40th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz), Hong-Kong, China, 2015.Google Scholar
[4] Grzyb, J.; Statnikov, K.; Pfeiffer, U.: A lens-coupled all-silicon integrated 2 × 2 array of harmonic receivers for THz multi-color active imaging, in 9th Eur. Conf. on Antennas and Propagation (EuCAP), Lisbon, Portugal, 2015.Google Scholar
[5] Statnikov, K.; Grzyb, J.; Heinemann, B.; Pfeiffer, U.R.: 160 GHz to 1 THz multi-color active imaging with a lens-coupled SiGe HBT chip-set. IEEE Trans. Microw. Theory Tech., 99 (1) (2015), 1–13.Google Scholar
[6] Zhong, Q.; Choi, W.; Miller, C.; Henderson, R.; Kenneth, K.O.: A 210-to-305 GHz CMOS receiver for rotational spectroscopy, in IEEE Int. Solid-State Circuits Conf., San Francisco, 2016.Google Scholar
[7] Boppel, S. et al. : CMOS integrated antenna-coupled field-effect transistors for the detection of radiation from 0.2 to 4.3 THz. IEEE Trans. Microw. Theory Tech., 60 (12) (2012), 3834–3843.Google Scholar
[8] Berrier, A. et al. : Electronic THz-spectrometer for plasmonic enhanced deep subwavelength layer detection, in Eur. Microw. Conf., Paris, France, 2015.Google Scholar
[9] Tripodi, L. et al. : Broadband CMOS millimeter wave frequency multiplier with Vivaldi antenna in 3D chip-scale packaging. IEEE Trans. Microw. Theory Tech., 60 (12) (2012), 3761–3768.Google Scholar
[10] Marsland, R.A.; Valdivia, V.; Madden, C.J.; Rodwell, M.J.W.; Bloom, D.M.: 130 GHz GaAs monolithic integrated circuit sampling head. Appl. Phys. Lett., 55 (6) (1989), 592–594.Google Scholar
[11] van de Weide, D.W.; Bostak, J.S.; Auld, B.A.; Bloom, D.M.: All-electronic generation of 880 fs, 3.5 V shockwaves and their application to a 3 THz free-space signal generation system. Appl. Phys. Lett., 62 (1993), 22–24.Google Scholar
[12] Matters-Kammerer, M.K.; Goor, D.V.; Tripodi, L.: 20 GHz to 480 GHz on-chip broadband spectrometer in 65-nm CMOS technology, in Eur. Microw. Conf., London, United Kingdom, 2016.Google Scholar
[13] Matters-Kammerer, M.K.; Tripodi, L.; van Langevelde, R.; Cumana, J.; Jansen, R.H.: RF characterization of Schottky diodes in 65-nm CMOS. IEEE Trans. Electron Devices, 57 (5) (2010), 1063–1068.Google Scholar
[14] Jamshidifar, M.; Spickermann, G.; Schäfer, H.; Haring Bolivar, P.: 200-GHz bandwidth on wafer characterization of CMOS nonlinear transmission line using electro-optic sampling. Microw. Opt. Technol. Lett., 54 (8) (2012), 1858–1862.CrossRefGoogle Scholar
[15] Hu, X.; Tripodi, L.; Matters-Kammerer, M.K.; Cheng, S.; Rydberg, A.: 65 nm CMOS monolithically integrated sub-THz transmitter. IEEE Trans. Electron Devices, 32 (9) (2011), 1182–1184.Google Scholar
[16] Breden, C.; Pohl, N.; Jaeschke, T.; Aufunger, K.; Bilgic, A.: A 240 GHz single-chip radar transceiver in a SiGe bipolar technology with on-chip antennas and ultra-wide tuning range, in IEEE Radio Freq. Integr. Circuits Symp., Seattle, WA, USA, 2013.Google Scholar